Equipment sales, Service, Modification, Spare parts
Equipment sales, Service, Modification, Spare parts

Available Items Item

Stepper

Nikon

 S202A, S203B, S204B

 i7, i8, i9, i10, i11, i12, i14 

4425i, EX12

G6, G7, G8 

 

Canon

MPA-600Super, MPA-600FA 

MPA-500FAb,

 i1, i2, i3, i4, iW, i5 


Metrology Inspection


KLA Tencor 

2135, 2139

2351, 2360 2365, 2367

9000, 9110, 9130, 9150 


Diffusion

Track


TEL Furnace 200mm/300mm

Alpha-8S, Alpha-8SE 

Alpha-303i, Indy, Indy Plus

Formula 





TEL Track

ACT8, ACT12 

Mark7, Mark8 

Metrology SEM


Hitachi  

S-9380, S-9360, S-9220, S-9200 

S-8840, S-8820  

S-5200, S-4800, S-4700, S-4500  

 

Equipment Sales

• Used Equipment sales 

• Equipment Audit & Valuation (Visual Inspection & Testing) 

 

 

Service

• Refurbishment  

• Relocation  

• Installation  

• Field Service Support-Troubleshooting  

• Maintenance (Schedule PM)  

• Training according to each customers needs 

 

Spare parts

• Consumable parts  

• OEM & 2nd Source Parts  

• Repair(PCB & Component)  

 

Modification

• Wafer Inch conversion  

• Notch to Flat, Flat to Notch conversion  

• Illumination power upgrade 

• Modification for Diverse Substrate usage (glass wafer etc) 

 

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