Canon spare parts
Inquiry by E-mail
Please refer to the list below.
| NO | Maker | MFG No. | Version | Qty | Serial number | Remark |
| 1 | Canon | IUC-M | 1 | MPA-500FAb | ||
| 2 | Osram | HBO-2001W/CIEL | 4 | For Canon i-line | ||
| 3 | Canon | Reticel 320-04 | 2 | |||
| 4 | Canon | Reticel 325-02 | 2 | |||
| 5 | Canon | Reticel 365-01 | 1 | |||
| 6 | Canon | Reticel 365-04 | 1 | |||
| 7 | Canon | Test Mask for stepper | 1 | |||
| 8 | Canon | ASET FOCUS | 1 | |||
| 9 | Canon | STAR | 1 | |||
| 10 | Canon | QUAL 2 | 1 | |||
| 11 | Canon | FIELD SERVICE SET-UP RETICLE | 1 | |||
| 12 | Canon | PELICLE | 2 | |||
| 13 | Canon | For Loading Test | 1 | |||
| 14 | Canon | 7" Focus Mask (Tilt Mask) | 3 | MPA600FA | ||
| 15 | Canon | 7" DR Mask | 1 | 52-1-C7 | MPA600FA | |
| 16 | Canon | 7" Glass Mask (Blank Mask) | Circle | 1 | MPA600FA | |
| 17 | Canon | 7" Glass Mask (Blank Mask) | Square | 1 | MPA600FA | |
| 18 | Canon | POS TEST MASK | 1 | MPA600FA | ||
| 19 | Canon | QUARTZ Wafer | 1 | 210-01-PR-C7 / 52-1-C7 | MPA600FA | |
| 20 | Canon | 6" Focus Mask (Tilt Mask) | 4 | MPA500FAb | ||
| 21 | Canon | 6" DR Mask | 2 | 52-1-S6 | MPA500FAb | |
| 22 | Canon | 5" DR Mask | 3 | 52-1-S5 | MPA500FAb | |
| 23 | Canon | 6" Glass Mask | 1 | |||
| 24 | Canon | Resolution Target | 1 | |||
| 25 | Canon | Quartz W/F 4inch | 1 | 52-1-S5 | ||
| 26 | Canon | Test Pattern No.9-2 | 1 | 10-14A-5 | ||
| 27 | Canon | 5" Reticle case | 15 | BG4-6415-000 |