Canon spare parts

Inquiry by E-mail
Please refer to the list below.
NO Maker MFG No. Version Qty Serial number Remark
1 Canon IUM-M   1   MPA-500FAb
2 Osram HBO-2001W/CIEL   4   For Canon i-line
3 Canon Reticel 320-04   2    
4 Canon Reticel 325-02   2    
5 Canon Reticel 365-01   1    
6 Canon Reticel 365-04   1    
7 Canon Test Mask for stepper   1    
8 Canon ASET FOCUS   1    
9 Canon STAR   1    
10 Canon QUAL 2   1    
11 Canon FIELD SERVICE SET-UP RETICLE   1    
12 Canon PELICLE   2    
13 Canon For Loading Test   1    
14 Canon 7" Focus Mask (Tilt Mask)   3   MPA600FA
15 Canon 7" DR Mask   1 52-1-C7 MPA600FA
16 Canon 7" Glass Mask (Blank Mask) Circle 1   MPA600FA
17 Canon 7" Glass Mask (Blank Mask) Square 1   MPA600FA
18 Canon POS TEST MASK   1   MPA600FA
19 Canon QUARTZ Wafer   1 210-01-PR-C7 / 52-1-C7 MPA600FA
20 Canon 6" Focus Mask (Tilt Mask)   4   MPA500FAb
21 Canon 6" DR Mask   2 52-1-S6 MPA500FAb
22 Canon 5" DR Mask   3 52-1-S5 MPA500FAb
23 Canon 6" Glass Mask   1    
24 Canon Resolution Target   1    
25 Canon Quartz W/F 4inch   1 52-1-S5  
26 Canon Test Pattern No.9-2   1 10-14A-5  
27 Canon 5" Reticle case   15   BG4-6415-000
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