Nikon spare parts
Inquiry by E-mail
Please refer to the list below.
Update : Aug 19, 2022
| Part number | Description | Qty | Remark |
| Irradiance meter with i-line sensor | 1 | ||
| Irradiance meter with G-line sensor | 1 | ||
| R2205HA | 1 | VER 7.01 | |
| R2205HB | 1 | VER 7.01 | |
| R2205HDIS | 1 | VER 2.87 | |
| R2205HMF | 1 | VER 5.09 | |
| R1505A | 1 | Ver 6.01 | |
| R1505A | 1 | Ver 6.30 Q | |
| R2005MF | 1 | Ver 3.09N | |
| R2005HMF | 1 | Ver 5.09 | |
| 6inch Reticle case (used) | 16 | 35mm | |
| 5inch Reticle case (new) | 32 | 26mm | |
| 5inch Reticle case (used) | 46 | 26mm | |
| 5inch Reticle case (used) | 10 | 18mm | |
| 4S586-580-1C | NEST | 1 | |
| DIGITAL VT286 | Working | 1 | |
| DIGITAL VT286 | Working | 1 | |
| DIGITAL VT284 | 1 | ||
| DIGITAL VT284 | 1 | ||
| 4K990-347AN | KBB04830 / Nikon compressor | 1 | |
| 4S060-782 | Ushio SB-20202AF-B power supply | 1 |
SOLD |
| HB-10210AF | Ushio G6E UV lamp power | 1 | SOLD |
| HB-10207AF-B | Ushio power supply | 2 | SOLD |
| HB-10207AF-C | Ushio power supply | 1 | SOLD |
| HB-10207AF-D | Ushio power supply | 1 | SOLD |
| Blind unit for 4425i | 1 | ||
| 4S061-690-1 | Linear motor controller | 1 | |
| CIMR-V7AABOP4 | Inverter (Yaskawa) | 1 | |
| FR-E520-0.4K | Inverter (Mitsubishi) | 2 | |
| UFD-603E-3-H33 | Inverter | 5 | |
| Lens controller 1 | 2 | ||
| Lens controller 2 | 1 | ||
| Lens controller | 1 | ||
| 5517A | HP Laser | 1 | |
| 5517B | HP Laser | 4 | |
| 5517C | HP Laser | 2 | |
| Ball screw | 4 | ||
| MM4 1001 | TDK power supply | 1 | |
| TRM 002C | TDK power supply | 1 | |
| WA107-1 | TDK power supply | 1 | |
| Bearing for Nikon stepper | |||
| FC-9801X | NEC Factory computer | 1 | |
| Video converter 3 | 1 | ||
| CCU | 2 | ||
| REG. UNIT 3 OPD | 3 | ||
| NVC6B-U | Camera control unit | 3 | |
| TEL 0593-64-1141 | Nitta / PL-4-6X4-YL | 2 | 1 SOLD |
| 12104 | PDTCT-DRV | 2 | 1 SOLD |
| 14125 | PDTCT-SIG | 2 | |
| 26042 | PDTCT-CPU | 1 | |
| 30146-1-A | PELCL | 1 | |
| 4S007-166 | UVDRV | 1 | |
| 4S007-166-A | UVDRV | 1 | |
| 4S007-209-1 | RI-SIG | 1 | |
| 4S014-051-2 | WL2CNT | 1 | SOLD |
| 4S015-028-B | RI-CPU | 1 | |
| 4S015-036-1 | 1 | ||
| 4S015-069 | NK386SX-2 | 1 | |
| 4S015-084 | BUSMON3 | 1 | |
| 4S017-037-C | AIR CNCT | 1 | |
| 4S017-037-C | AIR CNCT | 1 | |
| 4S017-037-D | AIR CNCT | 2 | |
| 4S017-052-D | OPD CTRL | 1 | |
| 4S017-052-E | OPD CTRL | 1 | |
| 4S017-365-C | RI-DRV | 1 | |
| 4S020-022 | CNTRL-1 | 1 | |
| 4S020-023A | CNTRL-2 | 5 | |
| 4S020-029-G | WGA-I/F | 1 | |
| 12104 | PDTCT-DRV | 7 | |
| 14105 | W.A.ANLG-2A | 2 | |
| 14125 | PDTCT-SIG | 5 | |
| 24100 | W.A.CNT-2A | 2 | |
| 26030 | LSA ALU | 2 | |
| 26042 | PDTCT-CPU | 8 | |
| 21020-2 | 4 | ||
| 23140-2A | 1 | ||
| 26028-1A | 7 | ||
| 26029-1 | LSA CCU | 2 | |
| 27124-1 | 4 | ||
| 30146-1 | PELCL | 1 | |
| 30146-1-A | PELCL | 1 | |
| 30149-1 | 2 | ||
| 30149-2 | 2 | ||
| 4S007-209 | RI-SIG | 1 | |
| 4S015-028 | RI-CPU | 1 | |
| 4S017-282 | CTL-CPU | 1 | |
| 4S017-365 | RI-DRV | 2 | |
| 4S020-104-1 | WLEXPCTL | 1 | |
| G41T-M6 | ECS | 1 | |
| 13097 | W.ALIGN-3B | 1 | |
| 13150 | 1 | ||
| 30246 | 1 | ||
| 10762-60001 | HP Laser PCB (~i10) | 2 | |
| 10764-60005 | Cable | 2 | |
| 10764-60008A | 840602 Fast pulse converter | 1 | G7E |
| 10764-60008A | 022605 Fast pulse converter | 1 | I7A |
| 12077A | 1 | ||
| 13181B | 1 | ||
| 15-038 | RBL-RLY | 2 | |
| 30069-2 | 1 | ||
| 30137-A | 1 | ||
| 4S005-003 | WALG-AMP | 1 | |
| 4S005-060A | WALG-AMD-1 | 1 | |
| 4S005-206-A | PPD-CCD | 1 | |
| 4S007-125 | 1 | ||
| 4S007-149 | 1 | ||
| 4S007-149 | 2 | ||
| 4S007-210 | WA-MPX-3 | 1 | |
| 4S015-036-1 | AWLCPU | 1 | |
| 4S017-095-C | 1U1NF2 | 1 | |
| 4S017-124-E | 1 | ||
| 4S017-225 | 1 | ||
| 4S017-367A | 1 | ||
| 4S017-556-B | PELCL | 1 | |
| 4S020-001 | STG6I | 1 | |
| 4S020-002-C | 1 | ||
| 4S020-006 | STMTB | 1 | |
| 4S020-016-2C | WLHMTH | 1 | |
| 4S020-016-2D | WLHMTH | 1 | |
| 4S020-016-2E | WLHMTH | 2 | |
| 4S020-020 | PLMDRV | 4 | |
| 4S020-048-A | 1 | ||
| 4S020-091-A | MAIN-I/F | 5 | |
| 4S020-092 | LIB-I/F | 1 | |
| 4S020-092-A | LIB-I/F | 4 | |
| 4S020-092-I | LIB-I/F | 1 | |
| 9ECU-101A | AII-CPU-03 | 1 | |
| D3142-901A | DISK DRIVE | 1 | |
| H-43006A | 4 | ||
| KBA01001 | AE14-1 13154 | 1 | |
| TRG01 | 1 | ||
| LED SWICHER | 1 | ||
| AII-CPU-02-K | 1 | ||
| IFCIO SE10-104 | 1 | ||
| 05-LPL-902-065 | MELLES GRIOT | 1 | |
| 22/2K 173:1 | motor | 1 | |
| 22/2K 30.7:1 | motor unit 107422 | 1 | |
| 22/2K 54.6:1 | halving motor | 15 | |
| 4S007-149 | 1 | ||
| F1-40MR | Mitsubishi Melsec Programmable Controller | 1 | |
| F1-60MR | Mitsubishi Melsec Programmable Controller | 1 | |
| F-40M | Mitsubishi Melsec Programmable Controller | 1 | New |
| GLS5410B | NEC GAS LASER POWER UNIT | 1 | |
| KZ-U3/UM100 | Keyence | 2 | |
| LP-2000SM | Laser power supply | 4 | |
| bar code reader | 3 | ||
| LIA Scanner | 1 | ||
| 38/1 14:1 | Motor | 1 | |
| 16/5 41:1 | Motor | 2 | |
| 16/5 11.8:1 | Motor | 3 | |
| 20KK-K261-01VB | Motor | 1 | |
| 22/2K 17.2:1 | Motor | 3 | |
| 4S602-016AN | 2233F012SG 22/2K 173:1 Motor | 1 | New |
| 22/2K 173:1 | Motor | 3 | |
| 22/2K 30.7:1 | Motor | 4 | |
| 22/2K 97.3:1 | Motor | 7 | |
| 23LM-C001 | Minebea miniangle stepper motor | 3 | |
| 4S007-149 | PCB | 1 | |
| 4S554-005 | DIGIMICRO 2B150-803 | 1 | |
| 4S602-194 | 3.1:1 DC Motor | 2 | |
| K3TG-V317 | OMRON | 1 | |
| KBB00035 | PF5-48 Pulse motor | 1 | 70321-025 |
| MCSB 1-04 | OGURA CLUTCH | 1 | |
| MCSB 1-05 | OGURA CLUTCH | 3 | |
| MH-15M | Digimicro | 1 | |
| MU-501C | DIGIMICRO | 1 | |
| P09001 | 1 | ||
| RE30-100-200 | COPAL/Elevator encoder | 3 | |
| UGQMEM-01SNQ22 | Motor | 1 | |
| UGRMEM-02SNQ33 | Stage motor for i8 | 3 | |
| UGTMEM-01SNQ11 | Motor | 5 | |
| UGTMEM-01SNQ31 | Motor | 1 | |
| UGTMEM-03SB2 | Yaskawa motor | 2 | |
| Stage block (G6/G7) | 2 | ||
| Elevator clutch | 2 | ||
| OF Hammer block | 1 | ||
| Beam attenuator | 1 | ||
| block for G6 | 2 | ||
| 4G055-010AN | 1 | ||
| 4G055-012AN | 1 | ||
| 4G570-006-1AN | 2 | ||
| 4G602-012 | N003 | 2 | |
| 4G605-020 | ND50 | 1 | |
| 4G622-005AN | 1 | ||
| 4G622-013 | 1 | ||
| 4G622-024AN | 1 | ||
| 4L990-024AN | 1 | ||
| BL08310AB | 1 | ||
| KBB00016 | SR309-286CAN 286C | 6 | |
| KBB00035 | 526B | 1 | |
| KBB00101 | G6 | 6 | |
| KBB00101 | G5 | 3 | |
| KBB00101 | AL12 | 1 | |
| KBB00101 | AL11 | 3 | |
| KBB00139 | AL7 | 3 | |
| KBB00139 | AL8 | 2 | |
| KBB00175 | G104 | 5 | |
| KBB00205 | G5 | 3 | |
| KBB00205 | G6 | 1 | |
| KBB00602 | AL04 | 1 | |
| KBB00602 | G05 | 1 | |
| KBB00605 | G04 | 1 | |
| KBB00633 | G04 | 1 | |
| KBB01013 | G01 | 3 | |
| KBB02003 | G09 | 1 | |
| ellipse lens for G6/G7/i7 | 2 | ||
| main sub filter for G-line | 2 | ||
| 3rd mirror for G6 | 2 | ||
| G2 mirror for G6/G7 | 6 | ||
| Correct lens for i9/i10/i11 | 1 | ||
| G-line condensor lens | 10 | ||
| Lens (3cm정도) | 8 | ||
| 05LPL230 | PD Laser power AMP(MELLES GRIOT) | 3 | For G6 |
| 05LPL235 | PD Laser power AMP(MELLES GRIOT) | 2 | |
| 05-LPL-902-065 | MELLES GRIOT | 1 | |
| 10780F | HP remote receiver | 2 | |
| 4S007-149 | PCB | 1 | |
| 4S046-230AN | CCD Camera cable | 1 | DTXC-12908S |
| KBB00697 | 20002 Fan | 1 | |
| KBB04210-01 | CS-PDA 16x200A-W2 | 2 | |
| LP-2000 | Laser power supply | 4 | |
| LP-2000K | Laser power supply | 2 | |
| LP-2000N | Laser power supply | 1 | |
| LP-2000SM | Laser power supply | 1 | |
| LX-130R | Keyence | 1 | |
| MU1238A-41BN | ORIX AC Fan | 1 | |
| Setra 470 | 1 | ||
| TL-258 | 1 | ||
| WLG-202S | 1 | ||
| LIA for i9 | 1 | ||
| LIA for i10 | 1 | ||
| solenoid valve | 3 | ||
| Parts block for CCD | 4 | ||
| Pressure gauge | 1 | Misshin | |
| 100-100S-U2 | Recording chart paper | 1 | |
| KBB00116 | SHIMADEN 30-15189-0 | 1 | temperature and humidity clock |
| 4K680-222AB | 1 | ||
| 680-033 | PA36 | 3 | |
| UGRMEM-01SNQ12 | MINERTIA MOTOR | 2 | |
| 779175C-01 | NI-488.2 for windows | 1 | |
| KCQ-104 | KEVIS/Color quad system | 1 | |
| L7007HD | 7inch TFT monitor | 1 | |
| LK201 | Digital keyboard | 1 | |
| LK201 | Digital keyboard | 1 | |
| 경광등 | 2 | ||
| 05LPL230 | MELLES GRIOT | 1 | |
| Hitachi | Video monitor | 1 | |
| Ikegami | Video monitor | 3 | |
| WV-BM500 | Video monitor | 3 | |
| Video monitor | 1 | ||
| KDP1640PA-4 | Monitor Panel | 1 | |
| SR17 | SHIMADEN | 2 | |
| SY05030 | 2 | ||
| WD800B15-RNN | WD | 1 | |
| MD-20RZ-ENL | Iwaki Magnet Pump | 2 | |
| 109S491 | Fan - Mini Ace 25 Sony Denki | 21 | |
| 4580N | Fan - ebmpapst | 1 | |
| 109P1224H402 | Fan - DC San Ace 25 | 2 | |
| 109P1224H402 | Fan - San Ace 120 | 2 | |
| 109P1224H4D01 | Fan - DC San Ace 25 | 1 | |
| 109S485 | Fan - San Ace 25 | 4 | |
| 109S488 | Fan - San Ace 25 | 1 | |
| 109-130 | Fan - San Ace 60 | 2 | |
| XC-77 | Sony CCD Camera | 2 | |
| 4S040-022BN | 1 | ||
| 4S990-449AN | 2 | ||
| KXA47367 A01+1 | 1 | ||
| 4S045-964AN | 1 | ||
| HD01-34574AN | 1 | ||
| KXA47029 | 3 | ||
| 4L990-141AN | 1 | ||
| 4T056-375BN | 1 | ||
| 4S040-022AN | 1 | ||
| HD01-3459AN | 1 | ||
| 4S990-450AN | 1 | ||
| HD01-3458AN | 1 | ||
| 4K070-022AN | 1 |